Semiconductor

High-Purity Sealing Solutions for Semiconductor Manufacturing
JYELASTOMER manufactures Precision rubber seals for demanding semiconductor applications where chemical resistance, thermal stability, low contamination and sealing reliability are critical.
Typical Applicaitons
    • Process Chambers
    • Vacuum Equipment
    • Etching Equipment
    • CVD / PVD Equipment
    • Wafer Processing Equipment
    • Chemical Delivery Systems
Typical Products

· FFKM O-Rings

· High-Purity O-Rings

· Custom Seals

· Gaskets 

Materials

FFKM · FKM · EPDM · VMQ

Key Performance
  • High Chemical Resistance
  • High Temperature Resistance
  • Low Outgassing
  • Low Contamination
  • Precision Dimensions